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X-Ray Àåºñ
XT H 320
ºê·£µå  : NIKON
 

Microfocus source      

Max. kV

Max. power

Focal spot size

Focal spot size  at max power

XT H 320

225 kV Reflection target

225 kV

225 W

3 µm up to 7 W

225 µm at 225 W

¡Û

225 kV Rotating target option

225 kV

450 W

10 µm up to 30 W

113 µm at 450 W

¡Û

320 kV Reflection target

320 kV

320 W

30 µm up to 30 W 

300 µm at 320 W 

¡Ü

¡Ü Basic configuration
¡Û Alternative configuration
 

Detectors

# Bits

Active pixels

Pixel Size

Max. frame rate at 1x1 binning

Max. frame rate at 2x2 binning

Varian 2520 (1)

14-bit

1900 x 1516

127 µm

7.5 fps

 15 fps

Perkin Elmer 0820

14-bit

1000 x 1000

200 µm

7.5 fps

 15 fps

Perkin Elmer 1620 

16-bit

2000 x 2000

200 µm

3.75 fps

 7.5 fps

Perkin Elmer 1621 EHS 

16-bit

2000 x 2000

200 µm

15 fps

30 fps

Combination

Configuration with both Flat panel and

PE162x & CLDA 

Curved Linear Diode Array detector

(1) Only with 225kV source

 

Manipulator

# Axes 4 (optional 5th axis)
Axes travel (X) 510 mm
(Y) 610 mm
(Z) 800 mm
(Rotate) n*360
Max. sample weight 100kg

 

General

Cabinet dimensions (LxWxH) 2,695 mm x 1,828 mm x 2,249 mm
Weight 8,000 kg
Safety All systems are manufactured to IRR99
Control software  All systems are controlled by Nikon Metrology¡¯s in-house Inspect-X software 

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