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OLED ¹Ú¸·ºÐ¼®¿ë ¿¤¸³¼Ò¹ÌÅÍ
FF-UVISEL with MWL63ch
ºê·£µå  : HORIBA

No

Item

Specification

1

Model

FF-UVISEL with MWL63ch

2

Measurement sample

Glass substrate

3

Measurement performance

NIST (or VLSI) standard sample »ç¿ë.

1 mm Á÷°æ pinhole »ç¿ë. Sample¼öµ¿ ¼ÂÆÃ.

1) NIST (or VLSI) sample »ç¾ç

-. Film ÀçÁú :  SiO2(Approx. 100 nm)

-. Thickness    :  Error must be £«/£­ 0.5 nm

2) Repeatability accuracy

Monochrometer and Multi-Channel

sample waferÀÇ µ¿ÀÏ point¸¦ µ¿ÀÏ ½Ã½ºÅÛ¿¡¼­ 10ȸ ¿¬¼Ó ÃøÁ¤Çϸç, repeatability accuracy´Â 3¥ò·Î defineµÈ´Ù.

¨ç Film thickness (3¥ò):

0.25% or less (Using NIST or VLSI 100nm)

¨è Refractive index(3¥ò):

1.0% or less (Using NIST or VLSI 100nm)

3) Absolute accuracy

sample waferÀÇ µ¿ÀÏ point¸¦ µ¿ÀÏ ½Ã½ºÅÛ¿¡¼­ 10ȸ ¿¬¼Ó ÃøÁ¤Çϸç, absolute accuracy´Â Æò±ÕÀ¸·Î defineµÈ´Ù.

¨ç Film thickness:

within £«/£­2.0% for guaranteed thickness by NIST (or VLSI)

 

¡Ø Remarks:

1)  NIST (or VLSI) sampleÀº ¿À¿°µÇÁö ¸» °Í.

2)  Monochormeter¿Í MWLÀÇ Performance Â÷ÀÌ´Â guarantee item ¿¡ Æ÷ÇÔµÇÁö ¾Ê´Â´Ù.

4

Wavelength

Standard :  210 nm - 880 nm

5

Incident angle

Standard :  60 degree (fixed)

6

Spot Size

1)      Approx. 1 mm x 2mm:

2)      Approx. 500¥ìm x  500¥ìm

7

Spectrometer

1) Monochrometer type : Wavelength 210 - 880 nm (M-200)

2) Multi-channel type  : Wavelength 210 - 880 nm

(MWL SCAN) 63Ch

 

¡Ø Remarks

¨ç MWL spec.Àº 63 ch.À» base·Î ÇÑ´Ù.

¨è Wavelength´Â eV ¸¦ base·Î 32·Î ³ª´©¾î Áø´Ù.

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