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XT H 225 ST
ºê·£µå  : NIKON

Microfocus source          

Max. kV

Max. power

Focal spot size

Focal spot size  at max power

180kV Transmission target 180 kV 10 W 1 µm up to 3 W 10 µm at 10 W
225 kV Reflection target 225 kV 225 W 3 µm up to 7 W 225 µm at 225 W
225 kV Rotating target option 225 kV 450 W 10 µm up to 30 W 113 µm at 450 W

 

Detectors                  

# Bits

Active pixels

Pixel Size

Max. frame rate  at 1x1 binning

Max. frame rate  at 2x2 binning

Varian 2520

14-bit

1900 x 1516

127 µm

7.5 fps

15 fps

Varian 4030

14-bit

2300 x 3200

127 µm

3 fps

7 fps

Perkin Elmer 0820

16-bit

1000 x 1000

200 µm

7.5 fps

15 fps

Perkin Elmer 1620 

16-bit

2000 x 2000

200 µm

3.75 fps

7.5 fps

Perking Elmer 1621 EHS 

16-bit

2000 x 2000

200 µm

15 fps

30 fps

 

Manipulator

# Axes 5
Axes travel (X) 450 mm
(Y) 350 mm
(Z) 750 mm
(Tilt) +/- 30
(Rotate) n*360¡Æ
Max. sample weight 50kg

 

General

Cabinet dimensions (LxWxH) 2,414 mm x 1,275 mm x 2,202 mm
Weight 4,200 kg
Safety All systems are manufactured to IRR99
Control software  All systems are controlled by Nikon Metrology¡¯s in-house Inspect-X software 

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